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International Journal of Instrumentation Control and Automation

Abstract

In this work an effective MEMS based capacitive pressure measurement system is proposed. Thepressure sensing element consists of two capacitorplates. Thebottom plate is mechanically fixed, whilethe upper plate is a flexible silicon membrane with flexures. The pressure acts on the upper plate. Avariable separation between the plates is introduced.Maximizing the deflection of the plate is a keyto improve the sensitivity of the sensor. In this paper various flexure designs are studied. A comparison of the flexure sensitivity is made for the automobile tire pressure range.

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