The present work provides a detailed account of design and analysis for a typical comb-driven capacitively sensed microgyroscope. The general approach pursured in this paper is to show the possibility of achieving wide-bandwidth frequency responses in drive mode of vibratory gyroscope. Towards this goal one major design concept were discussed.
Shreshtha, Priya.P. and Mohite, Sushas S.
"Design And Analysis of Rotation Rate Sensor - Modeling of vibratory MEMs Gyroscope,"
International Journal of Applied Research in Mechanical Engineering: Vol. 2
, Article 9.
Available at: https://www.interscience.in/ijarme/vol2/iss3/9